Title: Critical metrology for ultrathin high k dielectrics
Authors: Vandervorst, Wilfried ×
Brijs, Bert
Bender, Hugo
Conard, Thierry
Petry, Jasmine
Richard, Olivier
Blasco, X
Nafría, M #
Issue Date: 2003
Publisher: AIP
Host Document: pages:129-138
Conference: Characterization and Metrology for ULSI Technology location:Leuven Belgium date:24/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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