Title: Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
Authors: Sedky, Sherif ×
Fiorini, Paolo
Caymax, Matty
Loreti, S
Baert, Kris
Hermans, Lou
Mertens, Robert #
Issue Date: 1998
Series Title: Journal of Microelectromechanical Systems vol:7 issue:4 pages:365-72
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science