Title: CD control using SiON BARL processing for sub 0.25?m lithography
Authors: Zhang, Fenghong
Op de Beeck, Maaike
Ronse, Kurt
Gangala, Hareen K
Gopalan, P
Conley, P
Dusa, M
Bendik, Joe
Issue Date: 1998
Conference: MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.