|ITEM METADATA RECORD
|Title: ||CD control using SiON BARL processing for sub 0.25?m lithography|
|Authors: ||Zhang, Fenghong|
Op de Beeck, Maaike
Gangala, Hareen K
|Issue Date: ||1998 |
|Conference: ||MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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