Title: Creep resistant aluminum alloys for use in MEMS
Authors: Modlinski, Robert ×
Witvrouw, Ann
Ratchev, Petar
Puers, Robert
De Wolf, Ingrid #
Issue Date: 2005
Publisher: IOP
Series Title: Journal of micromechanics and microengineering: structures, devices and systems vol:15 issue:7 pages:S165-S170
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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