|ITEM METADATA RECORD
|Title: ||Plasma immersion ion implantation for shallow junctions in silicon|
|Authors: ||Pinter, Istvan|
|Issue Date: ||1998 |
|Conference: ||E-MRS 1998 Spring Meeting; 16-19 June 1998; Strasbourg, France.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Semiconductor Physics Section|
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