Title: Plasma immersion ion implantation for shallow junctions in silicon
Authors: Pinter, Istvan
Abdulhadi, A
Makaro, Z
Khanh, N
Adam, M
Barsony, I
Sivoththaman, Sivanarayanamoorthy
Poortmans, Jef
Song, H
Adriaenssens, Guy
Issue Date: 1998
Conference: E-MRS 1998 Spring Meeting; 16-19 June 1998; Strasbourg, France.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Semiconductor Physics Section

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