ITEM METADATA RECORD
Title: Structural change in porous silica thin film after plasma treatment
Authors: Kondoh, Eiichi ×
Baklanov, Mikhaïl
Bender, Hugo
Maex, Karen #
Issue Date: 1998
Series Title: Electrochemical and Solid-State Letters vol:1 issue:5 pages:224-226
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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