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Title: Post dry-etch cleaning issues of an organic low-K dielectric
Authors: Lanckmans, Filip
Baklanov, Mikhaïl
Alaerts, Carine
Vanhaelemeersch, Serge
Maex, Karen
Issue Date: 1998
Conference: 4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 September 1998; Oostende, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous

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