Title: Solid state MAS NMR spectroscopic characterization of plasma damage and UV modification of low-k dielectric films
Authors: Abell, Thomas ×
Houthoofd, Kristof
Iacopi, Francesca
Grobet, Pierre
Maex, Karen #
Issue Date: 2005
Publisher: The Society
Host Document: Materials Research Society Symposium Proceedings vol:863 pages:35-40
Conference: Materials, technology, and Reliability of Advanced Interconnects location:San Francisco, CA, USA date:28/03/05
ISSN: 0272-9172
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Centre for Surface Chemistry and Catalysis
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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