Title: Aggressive scaling of Cu lowk: impact on metrology
Authors: Maex, Karen ×
Brongersma, Sywert
Iacopi, Francesca
Vanstreels, Kris
Travaly, Youssef
Baklanov, Mikhaïl
D'Haen, Jan
Beyer, Gerald #
Issue Date: 2005
Publisher: AIP
Conference: Characterization and Metrology for ULSI Technology location:Richardson TX USA date:14/03/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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