This item still needs to be validated !
Title: Carrier spilling revisited: on-bevel junction behavior of different electrical depth profiling techniques
Authors: Clarysse, Trudo ×
Eyben, Pierre
Duhayon, Natasja
Xu, Mingwei
Vandervorst, Wilfried #
Issue Date: Mar-2003
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:21 issue:2 pages:729-736
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science