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Title: Bias-induced junction displacements in scanning spreading resistance microscopy and scanning capacitance microscopy
Authors: Eyben, Pierre ×
Duhayon, Natasja
Clarysse, Trudo
Vandervorst, Wilfried #
Issue Date: Mar-2003
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:21 issue:2 pages:737-743
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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