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Title: Experimental investigation of the impact of line-edge roughness on MOSFET performance and yield
Authors: Croon, Jeroen ×
Leunissen, Peter
Jurczak, Malgorzata
Benndorf, Michael
Rooyackers, Rita
Ronse, Kurt
Decoutere, Stefaan
Sansen, Willy
Maes, Herman #
Issue Date: 2003
Host Document: pages:227-230
Conference: 33rd European Solid-State Devices Research Conference - ESSDERC location:Leuven Belgium date:16/09/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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