Title: Single step alkaline cleaning solution for advanced semiconductor cleaning
Authors: Baeyens, Martien ×
Hub, W
Kolbesen, B. O
Martin Hoyas, Ana
Mertens, Paul #
Issue Date: 1999
Host Document: pages:23-26
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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