ITEM METADATA RECORD
Title: Single step alkaline cleaning solution for advanced semiconductor cleaning
Authors: Baeyens, Martien ×
Hub, W
Kolbesen, B. O
Martin Hoyas, Ana
Mertens, Paul #
Issue Date: 1999
Host Document: pages:23-26
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.