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Title: Characterisation of plasma etch related residues formed on top of ECD Cu
Authors: Baklanov, Mikhaïl
Conard, Thierry
Lanckmans, Filip
Vanhaelemeersch, Serge
Holmes, D
Maex, Karen
Issue Date: 1999
Conference: Advanced Metallization Conference; 28-30 September 1999; Orlando, FL, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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