|ITEM METADATA RECORD
|Title: ||Effects of oxygen and fluorine on the dry etch characteristics of organic low-k dielectrics|
|Authors: ||Baklanov, Mikhaïl ×|
Maex, Karen #
|Issue Date: ||1999 |
|Series Title: ||Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:17 issue:2 pages:372-379|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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