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|ITEM METADATA RECORD
|Title: ||Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping|
|Authors: ||Fouchier, Marc ×|
Vandervorst, Wilfried #
|Issue Date: ||May-2003 |
|Host Document: ||pages:607-616|
|Conference: ||Smart Sensors, Actuators, and MEMS location:Leuven Belgium date:19/05/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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