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Title: Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Authors: Fouchier, Marc ×
Eyben, Pierre
Alvarez, David
Duhayon, Natasja
Xu, Mingwei
Brongersma, Sywert
Lisoni, Judit
Vandervorst, Wilfried #
Issue Date: May-2003
Publisher: SPIE
Host Document: pages:607-616
Conference: Smart Sensors, Actuators, and MEMS location:Leuven Belgium date:19/05/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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