This item still needs to be validated !
Title: Two dimensional carrier profiling using scanning capacitance microscopy
Authors: Duhayon, Natasja ×
Clarysse, Trudo
Alvarez, David
Eyben, Pierre
Fouchier, Marc
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: 2003
Publisher: Electrochemical Society
Host Document: pages:293-304
Conference: Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science