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|ITEM METADATA RECORD
|Title: ||Two dimensional carrier profiling using scanning capacitance microscopy|
|Authors: ||Duhayon, Natasja ×|
Hellemans, Louis #
|Issue Date: ||2003 |
|Publisher: ||Electrochemical Society|
|Host Document: ||pages:293-304|
|Conference: ||Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes location:Leuven Belgium date:27/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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