Title: Observation of critical gate oxide thickness for substrate-defect related oxide failure
Authors: Bearda, Twan ×
Houssa, Michel
Mertens, Paul
Vanhellemont, Jan
Heyns, Marc #
Issue Date: 1999
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:75 issue:9 pages:1255-1257
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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