Title: Rapid thermal annealing of electro chemically plated Cu films
Authors: Beyer, Gerald
Kitabijan, P
Brongersma, Sywert
Bender, Hugo
Richard, Emmanuel
Vervoort, Iwan
Hey, P
Zhang, P
Maex, Karen
Issue Date: 1999
Conference: Advanced Metallization Conference location:Orlando, FL, USA date:September 28-30, 1999
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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