|ITEM METADATA RECORD
|Title: ||Rapid thermal annealing of electro chemically plated Cu films|
|Authors: ||Beyer, Gerald|
|Issue Date: ||1999 |
|Conference: ||Advanced Metallization Conference location:Orlando, FL, USA date:September 28-30, 1999|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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