Title: IMP liners for Al via speed fill
Authors: Beyer, Gerald ×
Maex, Karen
Daniels, Stephen
Maity, Nirmalya
Bassanini, Davide #
Issue Date: 1999
Host Document: pages:433-435
Conference: Advanced Metallization Conference in 1998. Proceedings of the Conference; location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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