Title: Recent developments in nuclear methods in support of semiconductor characterization
Authors: Brijs, Bert ×
Bender, Hugo
Huyghebaert, Cedric
Janssens, Tom
Vandervorst, Wilfried
Nakajima, K
Kimura, K
Bergmaier, A
Dollinger, G
van den Berg, J.A #
Issue Date: 2003
Publisher: Electrochemical Society
Host Document: pages:50-62
Conference: Analytical Techniques for Semiconductor Materials and Processes location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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