ITEM METADATA RECORD
Title: Interfacial properties of ZrO2 on silicon
Authors: Lin, Y.S ×
Puthenkovilakam, R
Chang, J.P
Bouldin, C
Levin, I
Nguyen, N.V
Ehrstein, J
Sun, Y
Pianetta, P
Conard, Thierry
Vandervorst, Wilfried
Venturo, V
Selbrede, S #
Issue Date: 2003
Series Title: Journal of Applied Physics vol:93 issue:10 pages:5945-2952
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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