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Title: Application of SCM to process development of novel devices
Authors: Duhayon, Natasja ×
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: 2003
Publisher: AIP
Host Document: pages:272-277
Conference: Characterization and Metrology for ULSI Technology location:Leuven Belgium date:24/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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