Title: Diffusion, activation and recrystallization of boron implanted in preamorphized and crystalline germanium
Authors: Satta, Alessandra ×
Simoen, Eddy
Clarysse, Trudo
Janssens, Tom
Benedetti, Alessandro
De Jaeger, Brice
Meuris, Marc
Vandervorst, Wilfried #
Issue Date: Oct-2005
Series Title: Applied Physics Letters vol:87 issue:17 pages:172109-1-172109-3
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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