Title: Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices
Authors: Alvarez, David ×
Hartwich, J
Kretz, J
Fouchier, Marc
Vandervorst, Wilfried #
Issue Date: 2003
Series Title: Microelectronic Engineering vol:67-68 pages:945-950
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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