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Title: A dedicated loading instrument for characterization and testing of MEMS
Authors: Kalicinski, Stanislaw ×
Sabuncuoglu Tezcan, Deniz
De Moor, Piet
De Vries, Atze-Cees
Van Hoof, Chris
Wevers, Martine
De Wolf, Ingrid #
Issue Date: Oct-2005
Publisher: Springer-Verlag
Series Title: Microsystem Technologies pages:538-545
ISSN: 0946-7076
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
Structural Composites and Alloys, Integrity and Nondestructive Testing
× corresponding author
# (joint) last author

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