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|ITEM METADATA RECORD
|Title: ||A dedicated loading instrument for characterization and testing of MEMS|
|Authors: ||Kalicinski, Stanislaw ×|
Sabuncuoglu Tezcan, Deniz
De Moor, Piet
De Vries, Atze-Cees
Van Hoof, Chris
De Wolf, Ingrid #
|Issue Date: ||Oct-2005 |
|Series Title: ||Microsystem Technologies pages:538-545|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Mechanical Metallurgy Section (-)|
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
Structural Composites and Alloys, Integrity and Nondestructive Testing
× corresponding author|
# (joint) last author|
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