Title: Temperature induced microstructural changes and deformation of metal alloys used for RF-MEMS switches
Authors: Modlinski, Robert ×
Puers, Robert
De Wolf, Ingrid #
Issue Date: Sep-2005
Publisher: Chalmers
Host Document: pages:183-186
Conference: Proceedings of the 16th MicroMechanics Workshop - MME location:Leuven Belgium date:04/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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