This item still needs to be validated !
ITEM METADATA RECORD
Title: Ultra shallow junctions formed by sub-melt laser annealing
Authors: Falepin, Annelies ×
Janssens, Tom
Severi, Simone
Vandervorst, Wilfried
Felch, S.B
Parihar, V
Mayur, A #
Issue Date: 2005
Publisher: IEEE
Host Document: pages:87-91
Conference: 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP location:Leuven Belgium date:04/10/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science