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Title: Ultra shallow junctions formed by sub-melt laser annealing
Authors: Falepin, Annelies ×
Janssens, Tom
Severi, Simone
Vandervorst, Wilfried
Felch, S.B
Parihar, V
Mayur, A #
Issue Date: 2005
Publisher: IEEE
Host Document: pages:87-91
Conference: 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP location:Leuven Belgium date:04/10/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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