Title: Integration of PVD ruthenium as a pMOS metal gate in scaled planar devices: workfunction and electrical performance on HfO2
Authors: Deweerd, Wim ×
Schram, Tom
Van Hoornick, Nausikaa
Witters, Thomas
Lisoni, Judit
Rohr, Erika
De Gendt, Stefan
Heyns, Marc
Schaekers, Marc
Richard, Olivier
Wickramanayaka, Sunil
Yamada, N
Brunco, David #
Issue Date: 2005
Publisher: Electrochemical Society
Host Document: pages:62-71
Conference: 4th International Conference on Semiconductor Technology - ISTC location:Leuven Belgium date:14/03/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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