Title: Evaluation of post metal etch cleaning by analyzing chemical compositions and distributions
Authors: Li, H
Baklanov, Mikhaïl
Boullart, Werner
Conard, Thierry
Brijs, Bert
Maex, Karen
Froyen, Ludo
Issue Date: 1998
Conference: 4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 September 1998; Oostende, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Physical Metallurgy and Materials Engineering Section (-)

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