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Keywords:

Science & Technology, Physical Sciences, Technology, Chemistry, Multidisciplinary, Materials Science, Multidisciplinary, Chemistry, Materials Science, 3D thin-film batteries, Li-ion microbatteries, microbattery, microstructured current collectors, solid-state batteries, ATOMIC LAYER DEPOSITION, SOLID-STATE BATTERIES, PLASMA-ASSISTED ALD, ELECTRICAL CHARACTERIZATION, CONFORMAL DEPOSITION, ENERGY-STORAGE, HIGH-POWER, LITHIUM, TIO2, ELECTROLYTES, 0306 Physical Chemistry (incl. Structural), 0912 Materials Engineering, 3403 Macromolecular and materials chemistry, 4016 Materials engineering, 5104 Condensed matter physics