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Title: Piezoelectric scavengers in MEMS technology: fabrication and simulation
Authors: Schmitz, Andreas ×
Sterken, Tom
Renaud, Michael
Fiorini, Paolo
Puers, Robert
Van Hoof, Chris #
Issue Date: Nov-2005
Publisher: University of Tokyo
Host Document: pages:61-64
Conference: Technical Digest PowerMEMS. 5th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Application location:Leuven Belgium date:28/11/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physics and Astronomy - miscellaneous
Faculty of Engineering Science - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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