|ITEM METADATA RECORD
|Title: ||The formation of Pd seeded copper layer on TiN substrates by electroless deposition|
|Authors: ||Min, Woo Sig|
Lee, D. N
|Issue Date: ||1998 |
|Conference: ||Advanced Metallization Conference; 6-8 Oct. 1998; Colorado Springs, USA.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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