ITEM METADATA RECORD
Title: The formation of Pd seeded copper layer on TiN substrates by electroless deposition
Authors: Min, Woo Sig
Lantasov, Yuri
Palmans, Roger
Maex, Karen
Lee, D. N
Issue Date: 1998
Conference: Advanced Metallization Conference; 6-8 Oct. 1998; Colorado Springs, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.