Title: The formation of Pd seeded copper layer on TiN substrates by electroless deposition
Authors: Min, Woo Sig
Lantasov, Yuri
Palmans, Roger
Maex, Karen
Lee, D. N
Issue Date: 1998
Conference: Advanced Metallization Conference; 6-8 Oct. 1998; Colorado Springs, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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