|ITEM METADATA RECORD
|Title: ||Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)|
|Authors: ||Hartwich, J ×|
Risch, Lothar #
|Issue Date: ||2003 |
|Conference: ||Proceedings 33rd European Solid-State Device Research Conference - ESSDERC location:Munchen Germany date:16/09/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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