Title: Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
Authors: Hartwich, J ×
Alvarez, David
Dreeskornfeld, L
Specht, M
Vandervorst, Wilfried
Risch, Lothar #
Issue Date: 2003
Conference: Proceedings 33rd European Solid-State Device Research Conference - ESSDERC location:Munchen Germany date:16/09/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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