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Title: A new scaling issue in the electrical behavior of damascene versus plasma-etched interconnects
Authors: Proost, Joris ×
Conard, Thierry
Boullart, Werner
Grillaert, Joost
Maex, Karen #
Issue Date: 1998
Host Document: pages:535-41
Conference: Proceedings Advanced Metallization and Interconnect Systems for ULSI Applications in 1997;
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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