Title: Quantitative modeling of H2 O2 decomposition in SC1
Authors: Mertens, Paul ×
Baeyens, Martien
Moyaerts, Gert
Okorn-Schmidt, H. F
Vos, Rita
De Waele, Rita
Hatcher, Z
Hub, W
De Gendt, Stefan
Knotter, Martin
Meuris, Marc
Heyns, Marc #
Issue Date: 1998
Host Document: pages:176-83
Conference: Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing; August 31 - Septemb location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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