Title: Effect of substrate defects on GOI of ultra-thin gate oxides
Authors: Bearda, Twan ×
Vanhellemont, Jan
Mertens, Paul
Heyns, Marc #
Issue Date: 1998
Host Document: pages:258-63
Conference: Proceedings of the 5th International Symposium on High Purity Silicon V; location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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