Title: The influence of oxygen on the Hf signal intensity in the characterisation of HfO2/Si stacks
Authors: Huyghebaert, Cedric ×
Conard, Thierry
Vandervorst, Wilfried #
Issue Date: 2003
Publisher: AVS Science and Technology
Host Document: pages:119
Conference: International Conference on Secondary Ion Mass Spectrometry - SIMS XIV location:Leuven Belgium date:14/09/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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