Title: Dopant profiling in NixSi1-x gates with secondary-ion-mass spectroscopy
Authors: Janssens, Tom ×
Kmieciak, Malgorzata
Kittl, Jorge
Fouchier, Marc
Lauwers, Anne
Kottantharayil, Anil
Vandervorst, Wilfried #
Issue Date: Jan-2006
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:24 issue:1 pages:399-403
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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