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Title: Plasma treatments of a low-k dielectric polymer surface
Authors: Martin Hoyas, Ana ×
Schuhmacher, Jörg
Whelan, Caroline
Schaekers, Marc
Celis, Jean-Pierre
Maex, Karen #
Issue Date: 2003
Conference: International Scientific Meeting Belgian Physical Society location:Paris France date:27/05/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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