ITEM METADATA RECORD
Title: Metal film characterization with qualified spreading resistance
Authors: Clarysse, Trudo ×
Hoflijk, Ilse
Zhang, Wenqi
Maex, Karen
Vandervorst, Wilfried #
Issue Date: 2003
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Santa Cruz, CA, USA date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science