Title: Metal film characterization with qualified spreading resistance
Authors: Clarysse, Trudo
Hoflijk, Ilse
Zhang, Wenqi
Maex, Karen
Vandervorst, Wilfried
Issue Date: 2003
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Santa Cruz, CA, USA date:27/04/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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