Title: Carrier illumination for characterization of ultra-shallow doping profiles
Authors: Clarysse, Trudo
Lindsay, Richard
Vandervorst, Wilfried
Budiarto, E
Borden, Peter
Issue Date: 2003
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous

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