Title: Carrier illumination for characterization of ultra-shallow doping profiles
Authors: Clarysse, Trudo ×
Lindsay, Richard
Vandervorst, Wilfried
Budiarto, E
Borden, Peter #
Issue Date: 2003
Host Document: pages:321-330
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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