|ITEM METADATA RECORD
|Title: ||Limitations and concerns in the sheet resistance measurement of ultra-shallow dopant profiles|
|Authors: ||Vandervorst, Wilfried ×|
Pawlak, Bartek #
|Issue Date: ||2003 |
|Host Document: ||pages:187|
|Conference: ||Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:27/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
All items in Lirias are protected by copyright, with all rights reserved.