Title: Limitations and concerns in the sheet resistance measurement of ultra-shallow dopant profiles
Authors: Vandervorst, Wilfried ×
Clarysse, Trudo
Loo, Roger
Pawlak, Bartek #
Issue Date: 2003
Host Document: pages:187
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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