Title: Characterization of ultra thin oxynitrides, a general approach
Authors: Brijs, Bert
Deleu, Jeroen
Conard, Thierry
De Witte, Hilde
Vandervorst, Wilfried
Nakajima, K
Kimura, K
Genchev, I
Bergmaier, A
Goergens, I
Neumaier, P
Dollinger, G
Dobeli, M
Issue Date: 1999
Conference: IBA-14-ECAART-6; July 1999; Dresden, Germany. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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