|ITEM METADATA RECORD
|Title: ||Characterization of ultra thin oxynitrides, a general approach|
|Authors: ||Brijs, Bert|
De Witte, Hilde
|Issue Date: ||1999 |
|Conference: ||IBA-14-ECAART-6; July 1999; Dresden, Germany. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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