Title: Stress in electrochemically deposited copper
Authors: Brongersma, Sywert ×
Richard, Emmanuel
Vervoort, Iwan
Maex, Karen #
Issue Date: 1999
Host Document: pages:249-254
Conference: Stress Induced Phenomena in Metallization: 5th International Workshop; Stuttgart, Germany, June 23-25, 1999. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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