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Title: Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing
Authors: Severi, Simone ×
De Meyer, Christina
Pawlak, Bartek
Duffy, Ray
Kerner, Christoph
McCoy, S
Gelpey, J
Selinger, T
Ragnarsson, Lars-Ake
Absil, Philippe
Biesemans, Serge #
Issue Date: Oct-2005
Publisher: Jap. Soc. Appl. Phys.
Host Document: pages:910-911
Conference: Extended Abstracts International Conference on Solid State Devices and Materials - SSDM location:Leuven Belgium date:13/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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