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Title: Work function of Ni silicide phases on HfSiON and SiO2: NiSi, Ni2Si, Ni31Si12 and Ni3Si fully silicided gates
Authors: Kittl, Jorge
Kmieciak, Malgorzata
Lauwers, Anne
Demeurisse, Caroline
Opsomer, Karl
Kottantharayil, Anil
Vrancken, Christa
Van Dal, Mark
Veloso, Anabela
Kubicek, Stefan
Absil, Philippe
Maex, Karen
Biesemans, Serge #
Issue Date: Jan-2006
Series Title: IEEE Electron Device Letters vol:27 issue:1 pages:34-36
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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