|ITEM METADATA RECORD
|Title: ||Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods|
|Authors: ||Caymax, Matty|
Maes, J #
|Issue Date: ||1999 |
|Host Document: ||pages:237-240|
|Conference: ||Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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