|ITEM METADATA RECORD
|Title: ||Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations|
|Authors: ||van Spengen, Merlijn ×|
De Wolf, Ingrid #
|Issue Date: ||2004 |
|Series Title: ||Microsystem technologies vol:10 issue:2 pages:89-96|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
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