Title: Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations
Authors: van Spengen, Merlijn ×
Puers, Robert
Mertens, Robert
De Wolf, Ingrid #
Issue Date: 2004
Publisher: Springer-Verlag
Series Title: Microsystem technologies vol:10 issue:2 pages:89-96
ISSN: 0946-7076
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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