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Title: Electrical quality assessment of epitaxial wafers based on p-n junction diagnostics
Authors: Claeys, Cor ×
Simoen, Eddy
Poyai, Amporn
Czerwinski, A #
Issue Date: 1999
Series Title: Journal of the Electrochemical Society vol:146 issue:9 pages:3429-3434
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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